With the help of a surface profiler it is possible visualize surface structures down to nanometer scales. A small stylus with a fine diamond needle attached, is scanned along the sample and its vertical deflection is detected. The applied down force can be varied between 0,05 and 50 mg according to the sample type.
By Using the profiler in this mode it is possible to obtain detailed information about the sample thickness as well as it´s micro roughness.
Although prolilers are most often used in a 2D scanning mode for step height measurements, the P15 used at Limedion also allows a 3D mode by scanning the sample in both, x and y directions, and therefore offers the capability to create 3 dimensional pictures of your sample on a nanometer scale. By measuring and comparing samples before and after a coating or deposition process it is furthermore possible to determine the stress of a coating.
The profiler used at Limedion has installed two indipendent video systems, which allows a very precise positioning of the scan head to any region of interrest on the sample. The maximum vertical scan length using the standard scanning head is 8 cm and can be expanded up to 8" by the use of a wide range head.
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Profilometer at Limedion : KLA-Tencor / P15